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Sputtering targets for flat panel displays (FPD)

Sputtering targets for TFT-LCD

PLANSEE sputtering targets made of molybdenum, tungsten, tantalum, chromium and their alloys are used for the production of electrode, adhesion or diffusion barrier layers for coatings used in TFT-LCD and touch screen panels. They are found in TV screens, monitors, cell phones, PND systems and other mobile devises. PLANSEE has the longest in-house supply chain for the production of sputtering targets.

All processes - from the raw material to the final product - are designed to assure constant disposibility and to reach the highest quality of our products. The result of our extensive powder metallurgical expertise: Our sputtering targets exhibit a high degree of purity, a homogeneous microstructure, and full density. 


 

The advantages of PLANSEE sputtering targets for flat panel displays:

  • Full density due to special deformation processes

  • High purity

  • Excellent homogeneity

  • Excellent corrosion resistance

  • All targets built to OEM specifications

  • Inhouse bonding services

  • Local service all over the world

 

Thin film materials:

  • Molybdenum and highly corrosion resistant molybdenum alloys
  • Tungsten
  • Tantalum
  • Chromium and chromium alloys
  • Aluminum
  • Copper

 

Geometries and dimensions

  • Rotary targets up to 4 m length

  • Planar targets up to Gen 10 or even higher

  • Customer-specific geometries

  • Inhouse bonding services

 

PLANSEE inhouse development. Setting new standards in tomorrow’s display technology.
Far-sighted investments in research and development form the backbone of our innovative power. PLANSEE is your partner in optimizing the layer structure for a perfect TFT performance. In cooperation with our customers and sputtering equipment manufacturers, we also develop customized materials and products. We utilize our own state-of-the-art coating and analysis laboratories to create new solutions at every stage of the target development process – from the feasibility check, prototyping and production, film deposition trials and layer performance tests, through to serial target production.

 

For further information about PLANSEE sputtering targets please contact coating@plansee.com. We are looking forward to your request!



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