Electron beam evaporation is commonly used for insulating and resistor films for electronic components as well as optical anti-reflection coatings and filters. In this technology the coating material is evaporated by an electron beam from a water-cooled crucible. Multi-layer coatings can be deposited in one duty cycle.
PLANSEE supplies:
Crucibles made of Mo, TZM, W and Ta
Emission cathodes
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Crucibles
Molybdenum and tungsten crucibles. Good corrosion resistance and high-temperature qualities.
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