Sputtering is a PVD method for manufacturing thin films by means of evaporating solid target material (the so called sputtering target) by means of an erosive plasma and depositing the evaporated target material onto the surface of the substrate forming a thin film layer.

In the sputtering process an argon plasma is ignited in a vacuum chamber and argon ions are accelerated towards a negatively charged cathode (target) by means of an electrical field. The argon ions hit the target with high kinetic energy, resulting in the emission of atoms of the target material. These atoms diffuse through the vacuum chamber and condense as a thin layer on the substrate.

As the leading supplier of planar and rotary sputtering targets, PLANSEE offers innovative solutions for optimal sputtering results and an efficient coating process. We adapt inherent material properties to meet the specific requirements of the customers and tune the properties of thin films. Many years of experience in powder metallurgy allows PLANSEE to meet the increasing requirements with respect to purity, grain structure, density and target geometry.

Our material range comprises:

• Molybdenum
• Tungsten
• Copper
• Aluminum
• Chromium
• Titanium
• as well as many alloys

Application areas of our sputtering targets:
- Flat panel displays (FPD): TFT-LCD
- Photovoltaic solar cells and heat absorbers
- Hard coatings
- Large area coatings
- Optical coatings

Fully integrated in-house production.
Best quality from powder production to the final product:
All our processes are designed to assure constant availability of sputtering targets that meet our customers’ requirements. We secure the long-term availability of raw materials, constantly work to develop new product dimensions and geometries, and adapt our production capacity to our customers’ volume requirements. Our fully automated and standardized production processes mean we offer a complete in-house manufacturing service.

 PLANSEE coating solutions

For further information about PLANSEE sputtering targets please contact coating@plansee.com. We are looking forward to your request.