An arc is ignited in a vacuum chamber between an electrode and a positively loaded arc cathode. The arc then evaporates the cathode material, which in a highly ionised form reacts in the vacuum chamber with a reactive gas (N₂, C₂H₄) and condenses on the substrate as a nitride, carbide or carbonitride.

The high evaporation  rate makes arc evaporation suitable for applications in hard material and wear-part coating, in tribology coating (automotive industry) as well as in decorative coatings.

PLANSEE supplies Arc Cathodes in:

• refractory metals (Cr)
• aluminium alloys (AlTi, AlTiX, AlTiXY, AlCr)
• ceramic materials (WC)

Sputtering Targets Planar, tubular, customer-specific geometries. more