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Electron Beam Evaporation

Electron beam evaporation is commonly used for insulating and resistor films for electronic components as well as optical anti-reflection coatings and filters. In this technology  the coating material is evaporated by an electron beam from a water-cooled crucible. Multi-layer coatings can be deposited in one duty cycle.
 
PLANSEE supplies:

  • Crucibles made of Mo, TZM, W and Ta
  • Emission cathodes 



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Crucibles
Good corrosion resistance and high-temperature qualities.
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