Our product portfolio for MOCVD (Metal organic chemical vapour deposition components) covers all critical components in molybdenum as well as tungsten as a replacement for rhenium. The geometries and material compositions of Suszeptoren blades, heating elements, spindles, heat shields and reactor insert assemblies are tailored to suit the specific requirements of the equipment of each individual manufacturer and guarantee a problem-free production process.
PLANSEE delivers
The advantages of our materials
- High melting point: Suitable for high temperature applications up to 2000°C (Mo) and 2800°C (W)
- Low vapour pressure: Ultra clean atmosphere, no contamination, ultra-high vacuum can be reached
- High corrosion and wear resistance: Extends the lifetime of parts used with all implant gases
- Highest material purity: Eliminates contamination in the ion implantation process
Advantages of metal compared to graphite for MOCVD components
- No absorption of oxygen and moisture
- No carbon contamination
- Low distortion and thermal stresses
For further information about our materials and components for MOCVD please contact electronics@plansee.com.
We are looking forward to your request! |