Our product portfolio for MOCVD (Metal organic chemical vapour deposition components) covers all critical finished and semi-finished components made of molybdenum as well as of tungsten. Our components are tailored to suit the specific requirements of the equipment of each individual manufacturer and guarantee a problem-free production process.
Product examples
- Molybdenum and MoCu wafers (dia 2, 3, 4 and 6”) for vertical LED
- Molybdenum, tantalum or tungsten liners for the metallization process of mirror layer for V-LED (vertical LED) technology
The advantages of our materials
- High melting point: Suitable for high temperature applications up to 2000°C (Mo) and 2800°C (W)
- Low vapour pressure: Ultra clean atmosphere, no contamination, ultra-high vacuum can be reached
- High corrosion and wear resistance: Extends the lifetime of parts used with all implant gases
- Highest material purity: Eliminates contamination in the ion implantation process
Advantages of metal compared to graphite for MOCVD components
- No absorption of oxygen and moisture
- No carbon contamination
- Low distortion and thermal stresses
For further information about our materials and components for MOCVD please contact electronics@plansee.com.
We are looking forward to your request! |