Our product portfolio for MOCVD (Metal organic chemical vapour deposition components) covers all critical finished and semi-finished components made of molybdenum as well as of tungsten. Our components are tailored to suit the specific requirements of the equipment of each individual manufacturer and guarantee a problem-free production process.

Product examples

• Molybdenum and MoCu wafers (dia 2, 3, 4 and 6”) for vertical LED
• Molybdenum, tantalum or tungsten liners for the metallization process of mirror layer for V-LED (vertical LED) technology

The advantages of our materials

• High melting point: Suitable for high temperature applications up to 2000°C (Mo) and 2800°C (W)
• Low vapour pressure: Ultra clean atmosphere, no contamination, ultra-high vacuum can be reached
• High corrosion and wear resistance: Extends the lifetime of parts used with all implant gases
• Highest material purity: Eliminates contamination in the ion implantation process

Advantages of metal compared to graphite for MOCVD components

• No absorption of oxygen and moisture
• No carbon contamination
• Low distortion and thermal stresses

 

For further information about our materials and components for MOCVD please contact electronics@plansee.com.   We are looking forward to your request!