E/G Electro-Graph.

PLANSEE E/G ElectrographE/G Electro-Graph is our specialist in the field of modules and spare parts for ion implantation systems. The company has more than 2 000 components made from molybdenum, tungsten, tantalum, graphite and ceramics in its catalog.






More than 90 % of all semiconductor manufacturers rely on E/G Electro-Graph's proven quality. With its in-house milling, lathing, grinding and joining facilities, E/G Electro-Graph can manufacture even the most intricate parts to an accuracy of a hundredth of a millimeter. All products are assembled and packaged in the company's clean room. 

More than just spare parts:
PLANSEE Advanced Standard.

E/G Electro-Graph has been working together closely with its customers for more than three decades and knows exactly what is important when it comes to spare parts. As an expert in the fields of engineering and materials composition, E/G Electro-Graph is much more than a one-to-one alternative for original spare parts.


For our developers at E/G Electro-Graph, good is never good enough. Thanks to the many analytical methods available to them, they are constantly finding valuable ways of improving on original spare parts.

The outstanding result: 

  • Simplified component installation and removal
  • Longer service lives
  • Lower cleaning costs
  • Reduced maintenance work
  • Reduced downtimes 
Fact Box
1979: Founded
2007: E/G Electro-Graph becomes part of the Plansee Group
Certification: ISO 9001


E/G Electro-Graph, Inc.
1491 Poinsettia Ave Suite 138, Vista, CA 92081, USA
Tel.:  +1 760 438 9090
Fax: +1 760 438 3923


 Open access map in Google Maps

Visit our product catalog:



Test our online product catalog: ionimplant.plansee.com.
In the new catalog you will find standard parts in OEM quality alongside parts and assemblies with Plansee’s own design for an extended service life and simplified handling.


For existing customers the catalog offers additional features. Open and completed orders can be reviewed and customers can get shipment details and download invoices. Contact us to receive your login dates: ionimplantation@plansee.com

Three grades of graphite.

Why we use three different material grades for ion implanter components made of graphite? Dr. Thomas Werninghaus shows you in less than 2 minutes.

Dr. Thomas Werninghaus
Email to Thomas
Tel. +49 3771 450964
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