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Components and spare parts for ion implantation.

Components for ion implantation / semiconductor industry Ion implantation is an important process during the manufacture of semiconductors. Implanters dope wafers with "foreign atoms" in order to modify material properties such as conductivity or crystal structure.

The heart of an implanter system is the beam path. Here, the ions are generated, concentrated, accelerated dramatically and guided at high speed to the wafer.

Temperatures of up to 1 400 °C, strong electromagnetic fields, aggressive process gases and powerful mechanical forces cause problems for conventional materials. But not for our products.


Our heat-resistant components made from molybdenum, tungsten, graphite or ceramics excel due their ideal combination of corrosion resistance, material strength, high thermal conductivity and absolute purity. 100 or more PLANSEE components are at work in every beam path. They ensure that the ions are generated efficiently and guided precisely and free from impurities along the beam path to the wafer. 



IIP beam path


Accurate to a thousandth of a millimeter and with more than 30 years of experience in the semiconductor industry, we produce components that conform precisely to the OEM standard or further develop these components at our production sites in Japan and the USA . Because, for our customers in the semiconductor industry, PLANSEE spare parts are increasingly becoming more than just spares. Taking the equipment manufacturer's original spare parts as our starting point, we optimize the geometries and material compositions. The benefits to you: 


  • Simplified component installation and removal
  • Longer service lives
  • Lower cleaning costs
  • Reduced maintenance work
  • Reduced downtimes


We know how important reproducible quality is for your process. Which is why we make sure that our quality is exceptional. Every single time. How do we do it? We have been manufacturing high-performance materials since 1921 and handle every stage of the production process ourselves – from the metal powder through to the finished product. Only implanter components that pass our rigorous quality controls are allowed to leave our factory.


Our products for the semiconductor industry. 

  • Chambers (graphite, tungsten, molybdenum and alloys)

  • Filaments (tungsten and tungsten alloys)

  • Arc slits (graphite, tungsten, molybdenum and alloys)

  • Holders (tungsten, molybdenum and alloys)

  • Cathodes (tungsten, molybdenum and alloys)
  • End station (graphite)
  • Analyzer components (graphite)
  • Insulators (ceramics)
  • Spare parts (graphite, tungsten, molybdenum and alloys, ceramics, steel)    

More than 100 implanter systems. One specialist for replacement parts.

It doesn't matter if you operate an older model or a brand-new system, or if it runs on medium or high current: We have the perfect replacement parts and upgrade systems for you. Get the most out of your ion implantation tool. Talk to us. Even if your ion implanter is not on the list yet. 


AIBT: istar


Applied Materials: 9000, 9200, 9200xR, 9500, 9500xR, Quantum, Quantum I, Quantum II, Quantum III, Quantum X, Quantum X+, Quantum xR, xR, xR/Leap, xR120, xR200, xR80


Varian Semiconductor Equipment (now Applied Materials): VIISta Trident, PLAD, VIISta HCS, VIISta HCP +/I, VIISta 80, E1000, VIISion 200, VIISion 200+, VIISion 80+, VIISta HC, 120-10, 120XP, 160XP, 180XP, 80XP, VIISta 3000, Genus, Kestrel, VIISta 810 XE/XER, VIISta 900 XPT, VIISion, E220, E500, VIISta 810, VIISta 810 XE, VIISta 900, VIISta 900XP, 300D, 300XP, 350D


Axcelis: GSD HC (200/200E/200E2), HC3, Ultra, Eterna, GSD 100, GSD 160A, GSD 200E, GSD 200E^2, GSD HC, GSD HC3, GSD III, GSD III LE, GSD LED, NV GSD, NV 10-160, NV 10-180, NV 10-80, Optima HD, ULE, Ultra, GSD HE, GSD VHE, GSD HE, GSD HE3, GSD VHE, Optima XE, Paradigm XE, NV 3206/3204, NV 6200, NV 8200, NV 8250, Optima MD


Nissin: NH80, PR80, Exceed 3000, CLARIS, EXCEED2000A/2000AH, EXCEED2300AV, EXCEED3000AH, EXCEED9600A, NH20, NH45




Ulvac: IH-860, IDZ-7000, IDZ-8001, IDZ-9001, IM-200, IW-630



Visit our product catalog:



Test our online product catalog:
In the new catalog you will find standard parts in OEM quality alongside parts and assemblies with Plansee’s own design for an extended service life and simplified handling.


For existing customers the catalog offers additional features. Open and completed orders can be reviewed and customers can get shipment details and download invoices. Contact us to receive your login dates:

An example?
Cutting costs with PLANSEE MRS vanes.

Wherever we see the potential to improve standards and save our customers time and money, we offer Advanced Standard Solutions. Taking the equipment manufacturer's original spare parts as our starting point, we optimize the geometries and material compositions. Would you like to put us to the test? We'll be happy to oblige. You get improved spare parts to try out at a very economical price. So that you can be completely certain.


 Would you like an example? That's not a problem.


 MRS plate compliant with OEM standard

MRS plate in compliance with the OEM standard


 Improved design for a longer service life

Improved design for a longer service life


In the IIP process, the MRS vane filters out the ions which do not have the correct charge or mass. Only the ions that pass through the mass resolution slot continue on their path to the wafer. The MRS vane is exposed to abrasion caused by the collision of the ion beam. An angle at the side facet minimizes this abrasion. However, the IIP process also involves chemical reactions and wear that are all the greater, the more acute the angles at the relevant surfaces are. By way of a compromise, an angle of 92 °C is used in the OEM standard part.


But we are not content to make compromises and have further improved the original part: To do this, we construct the area where the ion beam impacts with the greatest force almost as a right angle. In contrast, the areas at the edge - which are primarily affected by chemical and thermal reactions - are produced with only shallow angles.


To make sure that our customers are supplied with the perfect product, we are also very fussy about the materials we use. Conventional graphite is extremely coarse-grained and can cause high levels of particle formation during the process. For manufacturers of electrical components involving particularly small-scale structures, this type of impurity can cause major problems. We offer our customers a particularly hard, robust graphite. This is significantly less vulnerable to abrasion and consequently reduces the formation of particles during the process.


And the improvements we make at PLANSEE bring great benefits for our customers. Advanced Standard MRS vanes last up to three times longer than conventional OEM models.

A single source for all your needs.

We handle every stage in the manufacture of our products in-house. From the raw materials through to the finished product: including the development of new materials. In this way, we can guarantee that you benefit from the very best quality.


Raw material Reduction  Metal powder Mixing Pressing Sintering Forming Heat treatment Machining-Joining-Coating Quality assurance

Raw material










Sure and certain.

    Ever since 1921, our customers have been able to rely on Plansee as an independent private company. Like us, they place great importance on reliability and continuity – especially when it comes to raw materials procurement. With Global Tungsten & Powders (GTP) and a holding in Molibdenos y Metales (Molymet), the Plansee-Group covers all the stages involved in the processing of tungsten and molybdenum – from powder manufacture through the subsequent powder metallurgy processes and on to the production of semifinished products and customer-specific components.

Interested? We are here.

IIP Team An idea is only as good as the way it is put into practice. Tell us what challenge you are facing. Our IIP specialists are active worldwide. You need us directly on site? That's not a problem. We'll be there in less than 48 hours. Guaranteed! 


Choose your country and get to know us better.

Interested? We are here.

Three grades of graphite.

Why we use three different material grades for ion implanter components made of graphite? Dr. Thomas Werninghaus shows you in less than 2 minutes.

Dr. Thomas Werninghaus
Email to Thomas
Tel. +49 3771 450964


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