When one of PLANSEE Japan’s customers set it the challenge of halving their purchasing costs for arc chambers, PLANSEE Japan succeeded in coming up with a revolutionary new solution.
So far arc chambers were one single component that had to be replaced frequently. PLANSEE Japan produces and delivers “advanced standard” arc chambers for use in many state-of-the-art chip plants that make the latest generation of 300-mm wafers.
The only way to reduce the required cost of the arc chamber was to completely redesign it so that it was constructed from several separate parts that fitted together. As a result, the customer only needs to replace the worn components and can reuse the rest over multiple cycles.
Kazumi Ouchi, Account Manager at PLANSEE Japan’s Fukuoka Office, comments: “The success of the project is down to the strong relationship we have with our customers, and their willingness to take our suggestions on board. It is also due to our product managers’ extensive knowledge of ion implantation processes, as well as the material processing expertise of our production team in Esashi.”
