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Semiconductor Base Plates
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Semiconductor base plates of molybdenum and tungsten are used in power electronics as a carrier and contact plate for silicon wavers, where they carry off heat generated in the semiconductor. |
Discs made of the refractory metals mentioned above are being used because of their very good electrical and thermal conductivity as well as their low thermal expansion, very similar to the respective quality of silicon.
Versions:
- Lapped and electroplated surfaces
- Flatness tolerance of 3µ
Forms of delivery:
- Discs of W and Mo
- Mo rings
- Mo plates
- Pressed-sintered Mo pins
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