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Sputtering Targets and Arc Cathodes
Sputtering targets and arc cathodes are employed in many areas of manufacturing for the production of thin films:
- Metallising (microelectronics, displays, optical data storage, photo masks, CIS solar cells)
- Diffusion barriers (microelectronics, plastic foils)
- Magnetic and opto-magnetic layers (magnetic and opto-magnetic data storage)
- Functional coatings on glass (heat and solar protective coatings, anti-reflection and anti-static coatings, switchable electrochromic glazing
- Hard-material coatings (tools, automotive and mechanical engineering components)
- Tribology coatings (tools, automotive and mechanical engineering components)
- Decorative coatings (Instruments, ornamental fittings, watches, spectacle frames)
- Optical coatings (opthalmics, fine optics, optoelectronics, lamp and headlamp reflectors)
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Comprehensive know-how based on proprietary data combined with our knowledge of applications of high-performance materials allows PLANSEE to develop customer-specific target materials tailored to suit each individual application. |
Advantages:
- High density and purity
- Superior sputtering properties in reactive and non-reactive coating modes
- Excellent homogeneity
- Large targets as a single piece
PLANSEE supplies:
- Targets and arc cathodes (bonded, clamped) for sputtering and arc evaporation
- Planar, tubular, customer-specific geometries
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