E/G Electro-Graph.

E/G Electro-Graph is our specialist in the field of modules and spare parts for ion implantation systems. The company has more than 2 000 components made from molybdenum, tungsten, tantalum, graphite and ceramics in its catalog.

Plansee in California

More than just spare parts: Plansee Advanced Standard.

E/G Electro-Graph has been working together closely with its customers for more than three decades and knows exactly what is important when it comes to spare parts. As an expert in the fields of engineering and materials composition, E/G Electro-Graph is much more than a one-to-one alternative for original spare parts.

For our developers at E/G Electro-Graph, good is never good enough. Thanks to the many analytical methods available to them, they are constantly finding valuable ways of improving on original spare parts.

Spacer used in the implanter extraction system
High-density PFS (plasma flood system)

The outstanding result:

  • Simplified component installation and removal
  • Longer service lives
  • Lower cleaning costs
  • Reduced maintenance work
  • Reduced downtimes

1979: Founded
2007: E/G Electro-Graph becomes part of the Plansee Group
Certification: ISO 9001


E/G Electro-Graph, Inc.
1491 Poinsettia Ave Suite 138
Vista, CA 92081
United States of America
Tel: +1 760 438 9090
Fax: +1 760 438 3923
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