Components for epitaxial processes.

The epitaxial processes MOCVD (Metal Organic Chemical Vapor Deposition) and MBE (Molecular Beam Epitaxy) are of crucial importance, for example, during the manufacture of LED chips and transistors. These processes are used for the growth of the semiconductor layers.

Mandrel made of the molybdenum alloys TZM
Mandrel made of the molybdenum alloys TZM
Carrier made
of MOCVD reactors

Materials in an epitaxial reactor chamber must withstand temperatures of up to 2 200 °C. For Plansee, that's not a problem. We can manufacture temperature-resistant components made of molybdenum, tungsten, tantalum, and engineered alloys for your system.

  • Higher melting point: Molybdenum (melting point 2 620 °C), tantalum (melting point 3 017 °C), and tungsten (melting point: 3 420 °C) are refractory metals whose high melting points make them ideally suited for use in high-temperature processes like MOCVD and MBE.
  • Corrosion resistance: Molybdenum, tantalum and tungsten are corrosion-resistant in a variety of atmospheres even at very high temperatures.

Molybdenum

Tungsten

Ammonia gas

up to 1 000 °C (1 273 K)
no reaction
over 1 000 °C (1 273 K)
possible surface nitriding
up to 1 000 °C (1 273 K)
no reaction
over 1 000 °C (1 273 K)
possible surface nitriding

Noble gases

up to very high temperatures
no reaction
up to very high temperatures
no reaction

Carbon dioxide

oxidation at
over 1 200 °C (1 473 K
oxidation at
over 1 200 °C (1 473 K
Carbon monoxideoxidation at
over 1 400 °C (1 673 K)
oxidation at
over 1 400 °C (1 673 K)
Hydrocarbonscarburation at
over 1 100 °C (1 373 K)
carburation at
over 1 100 °C (1 373 K)
Air and oxygenoxidation at
over 400 °C (673 K)
sublimation at
over 600 °C (873 K)
oxidation at
over 500 °C (773 K)
sublimation at
over 850 °C (1 123 K)
Nitrogenup to very high temperatures
no reaction
(also applies to pure molybdenum)
up to very high temperatures
no reaction
(also applies to pure molybdenum)
Water vaporoxidation at
over 700 °C (973 K)
oxidation at
over 700 °C (973 K)
Hydrogenup to very high temperatures
no reaction
(note dew point)
up to very high temperatures
no reaction
(note dew point)
  • Outstanding purity: Impurities in reactor components may also contaminate the semiconductor during operation. To guarantee the quality of the semiconductors and the efficiency of the LEDs or transistors, our materials must be free of impurities. We guarantee a purity of over 99.97 %
  • Low vapor pressure: Our materials are ideally suited for use in high and ultra-high vacuums.
Vapor pressure molybdenum and tungsten

Special nondeformability requirements?

Molybdenum and tungsten keep in good shape even at high temperatures and when exposed to frequent cooling and heating cycles. With special alloys such as TZM, WVM, ML and WL, we have extended the lifetimes of our materials even further. They offer users outstanding creep resistance and material strength.

Why wait? Our ribbons, sheets, rods and wires manufactured from refractory metals are available for order online right now. Take a look: www.shop.plansee.com

Your contact person
Your contact Person for:
Jim Palombo
Give me a call:
+1 508 918 1230
or send an Email:
jim.palombo@plansee.com
Jim Palombo