お客様の蒸着材料に最適な蒸着ボートをお探しですか?”+”のものがおすすめ、”++”は特におすすめ品です。詳しい情報は是非お気軽にお尋ねください。

薄膜材料密度 [g/cm3]融点[°C]沸点[°C]蒸着源
W Mo Ta
Al2.76602467+
AIF3 2.9 1291 N/A++++
AI/1 – 4% Cu 2.7 650N/A+
AI/0.1 – 2% Si2.7 640N/A+
AI/4% Cu/1% Si2.7640N/A+
Ag 10.5 961 2212++++
As2S3 3.4 300 707++
Au 19.3 1063 2966+++
B2O3 2.5 460 2247++
BaF2 4.9 1280 2260++++++
BaTiO3 6.0 1600 N/A++
BeO 3.0 2530 4120+
Bi 9.8 271 1560++++++
BiF3 5.3 727 900++++
Bi2O3 8.9 820 1890++
CaF2 3.2 1360 2500++++++
CaO 3.3 2580 2850+
Cd 8.6 321 765++++++
CdSe 5.8 1350 N/A++++
CdS 4.8 1750 1405++++++
CdTe 6.2 1042 N/A++++
CeO2 7.1 2150 N/A++
CeF3 6.2 1460 1987++++
Co 8.9 1495 2900+++
Cr 7.2 1875 2482++
Cr2C3 6.7 1850 3800+
Cr2C3 5.2 2345 4000+
Cu 8.9 1083 2595++
Cu2O 6.0 1235 1800+
DyF3 7.5 1155 1900++
ErF3 7.8 1144 1920++
Er2O3 8.6 2400 N/A+
EuF3 6.7 1280 2270+
Eu2O3 7.4 2100N/A+
Fe 7.9 1536 3070+
Fe2O3 5.3 1594 N/A+
Ga 5.9 30 2403+
GaAs 5.3 1238N/A++
GaP4.1 1350N/A++++++
Ge 5.4 937 2830+
GeO2 4.2 1115N/A++++++
HfF2 7.1 1000N/A++
HoF3 7.6 1143 1895++
In7.31562000++++
In/10Sn 7.3 146 1000+
In2O3 7.2 2200N/A++
LaF3 6.0 1495 2400++++
La2O3 6.5 2260 4200++
LiF 2.6 842 1676++++
LuF3 8.3 1182 2200++++
Lu2O3 9.4 2400 N/A+++
Mg 1.7 650 1107++++++
MgF2 3.1 1266 2239++
MgO 3.6 2640 3600+
Mn 7.4 1245 2097+++++
MnS4.01615N/A++
MoO34.77951155++
MoS2 4.8 1185N/A++
Na3AIF62.91000N/A++++
Na5AI3F143.01027N/A++++
NaF2.69881695++++++
NdF3 6.5 1377 2400++++
Nd2O3 7.2 2240 N/A+
Ni8.9 1453 2732+
Ni/Cr 7.5-8.5 1500N/A+
Nb 8.6 2468 4927+
Nb2O5 4.5 1512N/A+
Pd12.015522927+
Pt 21.5 1769 3827+
PrF3 6.3 1399 2255++++
Pr2O3 7.1 2270N/A+
Rb1.539688+
SmF26.613062323++
Sm2O37.12325N/A+
ScF3 2.6 1530 1800++
Sc2O33.92400 N/A+
Se4.8217685+++
Si 2.314102355+
SiO2.117051880++++
Sn7.32322260++++
SnO26.911271850++
SrF24.214502489++++
Ta2O5 8.31880N/A+
Te6.24501390++++++
TbF3 7.211722280+
Tb2O37.92300N/A++
ThF46.311001680++++
Ti4.516683260+
TiO2 4.2 1775 2700+
TiO4.917503000++
Ti2O34.61760N/A++
V 6.119003410++
WO37.21473N/A++
Y4.515092927++
YF35.111552210++
YbF38.211572136++++
Yb2O3 9.22346N/A+
Zn7.1420907++++++
ZnSe5.41526N/A++++++
ZnS4.118501665++++
ZnTe5.51238N/A++++
Zr6.518523578+
ZrF44.4600908++
ZrO25.627004300+
ZrO6.42200N/A++