Ideal product properties
Temperatures up to 1400°C, strong electro-magnetic fields, aggressive process gases, and high mechanical forces are a problem for regular materials. Not so with our products. Our heat resistant components made from molybdenum, tungsten, graphite, or ceramics offer the ideal combination of corrosion resistance, material strength, good thermal conductivity, and absolute purity. One hundred or more Plansee components are used per beam path. They ensure that the ions are generated efficiently and are focused precisely on the wafer in the beam path without any impurities.